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P352 – Exit Slit Unit S1 I05 DLS
Application
Exit slit unit for soft X-ray synchrotron radiation
Year of delivery
2012
Installation site
Beamline I05 at Diamond Light Source, Didcot, United Kingdom
Design Features
-
Double slit mechanism – vertically and horizontally defining slits.
- Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
- OFHC slit blades.
-
Electrical isolation of horizontally defining slit blades.
- Motorized and encoded slit unit translation along beam axis.
- Bias plate with adjustable YAG screen.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 100 nm.
- Parallelism smaller than 1.5 µm over 10 mm edge length.
- Straightness smaller than 0.5 µm over 10 mm edgle length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Translation along beam axis
Range
± 100 mm
Resolution (design value)
0.015 µm /motor fine step
(1/64, recommended)
0.05 µm /encoder count
Horizontally defining slit (HDS)
Slit blades
Material
OFHC
Straightness
< 0.45 µm over 10 mm (1σ)
Parallelism
0.02 µm /mm
(10 µm slit opening)
0.06 µm /mm
(25 µm slit opening)
-0.006 µm /mm
(50 µm slit opening)
Slit opening
Range
0 µm to 8 mm
Repeatability
± 0.12 µm
(up to 325 µm slit opening)
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Vertically defining slit (VDS)
Slit blades
Material
OFHC
Straightness
< 0.15 µm over 10 mm (1σ)
Parallelism
-0.08 µm /mm
(10 µm slit opening)
-0.12 µm /mm
(25 µm slit opening)
-0.14 µm /mm
(50 µm slit opening)
Slit opening
Range
0 µm to 8.2 mm
Repeatability
± 0.04 µm
(up to 330 µm slit opening)
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count