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P373 - Exit slit unit for soft X-ray synchrotron radiation at BL5 beamline at synchrotron radiation source SSRL, USA - Bestec GmbH
P373 - Exit slit unit for soft X-ray synchrotron radiation at BL5 beamline at synchrotron radiation source SSRL, USA - Bestec GmbH

P373 – Exit Slit Unit BL5 SSRL

Application

Exit slit unit for soft X-ray synchrotron radiation

Year of delivery

2013

Installation site

BL5 beamline at synchrotron radiation source SSRL, USA

Design Features

Performance Features

  • Precision and slit opening repeatability smaller than 100 nm.
  • Parallelism smaller than 0.35 µm over 10 mm edge length.
  • Straightness smaller than 0.1 µm over 7 mm edge length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P373 - Outer dimensions - Exit slit unit for soft X-ray synchrotron radiation at BL5 beamline at synchrotron radiation source SSRL, USA - Bestec GmbH

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Material

1.4301

Base pressure

10-10 mbar range

Vertically defining slit (VDS)

Slit blades

Material

OFHC

Straightness

< 0.10 µm over 7 mm (1σ)

Parallelism

0.03 µm /mm
(5 µm slit opening)
0.003 µm /mm
(10 µm slit opening)
0.03 µm /mm
(25 µm slit opening)
0.03 µm /mm
(50 µm slit opening)

Slit opening

Range

5 µm to 5.6 mm

Repeatability

± 0.03 µm
(up to 300 µm slit opening)

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Performance Test Results

Slit width calibration (VDS)
P373 - Slit width calibration (VDS) - Exit slit unit for soft X-ray synchrotron radiation at BL5 beamline at synchrotron radiation source SSRL, USA - Bestec GmbH
Slit opening repeatability (VDS)
P373 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at BL5 beamline at synchrotron radiation source SSRL, USA - Bestec GmbH
Slit blade parallelism (VDS)
P373 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at BL5 beamline at synchrotron radiation source SSRL, USA - Bestec GmbH
Slit blade parallelism (VDS)
P373 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at BL5 beamline at synchrotron radiation source SSRL, USA - Bestec GmbH
Slit blade parallelism (VDS)
P373 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at BL5 beamline at synchrotron radiation source SSRL, USA - Bestec GmbH
Slit opening stability (VDS)
P373 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at BL5 beamline at synchrotron radiation source SSRL, USA - Bestec GmbH