Magnetron 3″ tilt (0001-07934)
Target dimention
3″ diameter, 4 – 8 mm thick
Motion axes
Manual driven in situ source tilt of max. 22°
Shutter drive
Pneumatic (speed adjustable by gas flow control)
Chimney
Scewed connical shape stainless steel sheet
Gas inlet
Gas inlet close to the target (pneumatic or manual gas inlet valve possible)