P468 – Exit Slit Unit S1 IPE LNLS
Application
Exit slit unit for soft X-ray synchrotron radiation
Year of delivery
2019
Installation site
IPE Beamline at Sirius Synchrotron Light Source, Brazil
Design Features
-
Double slit mechanism – vertically and horizontally defining slits.
-
Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
- OFHC slit blades.
- Electrical isolation of horizontally defining slit blades.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 100 nm.
- Parallelism smaller than 1.3 µm over 10 mm edge length.
- Straightness smaller than 0.15 µm over 10 mm edge length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
General
Vacuum chamber
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Horizontally defining slit (HDS)
Slit blades
Material
OFHC
Straightness
< 0.15 µm over 10 mm (1σ)
Parallelism
0.014 µm /mm
(20 µm slit opening)
-0.04 µm /mm
(50 µm slit opening)
0.05 µm /mm
(100 µm slit opening)
Slit opening
Range
2 µm to 4.7 mm
Repeatability
± 0.009 µm at 20 µm slit opening
± 0.016 µm at 45 µm slit opening
± 0.005 µm at 100 µm slit opening
Long-term stability (> 12 h)
0.01 µm
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Vertically defining slit (VDS)
Slit blades
Material
OFHC
Straightness
< 0.15 µm over 10 mm (1σ)
Parallelism
-0.02 µm /mm
(20 µm slit opening)
-0.09 µm /mm
(50 µm slit opening)
-0.12 µm /mm
(100 µm slit opening)
Slit opening
Range
2 µm to 4 mm
Repeatability
± 0.007 µm at 20 µm slit opening
± 0.007 µm at 50 µm slit opening
± 0.005 µm at 100 µm slit opening
Long-term stability (> 1 h)
0.008 µm
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Performance Test Results
Slit width calibration (HDS)
Slit opening repeatability (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit blades parallelism (HDS)
Slit opening stability (HDS)
Slit width calibration (VDS)
Slit opening repeatability (VDS)
Slit blades parallelism (VDS)
Slit blades parallelism (VDS)
Slit blades parallelism (VDS)
Slit opening stability (VDS)
Residual gas analysis
