P468 – Exit Slit Unit S2 IPE LNLS
Application
Exit slit unit for soft X-ray synchrotron radiation
Year of delivery
2019
Installation site
IPE Beamline at Sirius Synchrotron Light Source, Brazil
Design Features
-
Double slit mechanism – vertically and horizontally defining slits.
-
Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.
- OFHC slit blades.
- Electrical isolation of horizontally defining slit blades.
- Adjustable support structure.
Performance Features
- Precision and slit opening repeatability smaller than 100 nm.
- Parallelism smaller than 0.8 µm over 10 mm edge length.
- Straightness smaller than 0.15 µm over 10 mm edge length.
- Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.
Outer Dimensions
Technical specifications and performance values
Chamber type
cylindrical, horizontal axis
Main flanges
DN160CF cluster flanges
Material
1.4301
Base pressure
10-10 mbar range
Material
OFHC
Straightness
< 0.10 µm over 10 mm (1σ)
Parallelism
0.02 µm /mm
(20 µm slit opening)
0.02 µm /mm
(50 µm slit opening)
0.07 µm /mm
(100 µm slit opening)
Range
1.5 µm to 4.5 mm
Repeatability
± 0.011 µm at 20 µm slit opening
± 0.019 µm at 50 µm slit opening
± 0.009 µm at 100 µm slit opening
Stability (> 2 h)
0.006 µm
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count
Material
OFHC
Straightness
< 0.15 µm over 10 mm (1σ)
Parallelism
0.006 µm /mm
(20 µm slit opening)
0.005 µm /mm
(50 µm slit opening)
-0.01 µm /mm
(100 µm slit opening)
Range
2 µm to 4.2 mm
Repeatability
± 0.012 µm at 20 µm slit opening
± 0.009 µm at 50 µm slit opening
± 0.005 µm at 100 µm slit opening
Resolution (design value)
0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count