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P468 - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
P468 - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil

P468 – Exit Slit Unit S2 IPE LNLS

Application

Exit slit unit for soft X-ray synchrotron radiation

Year of delivery

2019

Installation site

IPE Beamline at Sirius Synchrotron Light Source, Brazil

Design Features

  • Double slit mechanism – vertically and horizontally defining slits.

  • Motorized and encoded slits opening, symmetric opening, non-linear opening characteristics.

  • OFHC slit blades.
  • Electrical isolation of horizontally defining slit blades.
  • Adjustable support structure.

Performance Features

  • Precision and slit opening repeatability smaller than 100 nm.
  • Parallelism smaller than 0.8 µm over 10 mm edge length.
  • Straightness smaller than 0.15 µm over 10 mm edge length.
  • Very small deviation (submicrometer) of the slit opening calibration curve from the theoretical non-linear slit opening function.

Outer Dimensions

P468 - Outer dimensions - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil

Technical specifications and performance values

General

Vacuum chamber

Chamber type

cylindrical, horizontal axis

Main flanges

DN160CF cluster flanges

Material

1.4301

Base pressure

10-10 mbar range

Horizontally defining slit (HDS)

Slit blades

Material

OFHC

Straightness

< 0.10 µm over 10 mm (1σ)

Parallelism

0.02 µm /mm
(20 µm slit opening)
0.02 µm /mm
(50 µm slit opening)
0.07 µm /mm
(100 µm slit opening)

Slit opening

Range

1.5 µm to 4.5 mm

Repeatability

± 0.011 µm at 20 µm slit opening
± 0.019 µm at 50 µm slit opening
± 0.009 µm at 100 µm slit opening

Stability (> 2 h)

0.006 µm

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Vertically defining slit (VDS)

Slit blades

Material

OFHC

Straightness

< 0.15 µm over 10 mm (1σ)

Parallelism

0.006 µm /mm
(20 µm slit opening)
0.005 µm /mm
(50 µm slit opening)
-0.01 µm /mm
(100 µm slit opening)

Slit opening

Range

2 µm to 4.2 mm

Repeatability

± 0.012 µm at 20 µm slit opening
± 0.009 µm at 50 µm slit opening
± 0.005 µm at 100 µm slit opening

Resolution (design value)

0.006 µm /motor fine step
(1/16, recommended)
0.05 µm /encoder count

Performance Test Results

Slit width calibration (HDS)
P468 - Slit width calibration (HDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
Slit opening repeatability (HDS)
P468 - Slit opening repeatability (HDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
Slit blades parallelism (HDS)
P468 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
Slit blades parallelism (HDS)
P468 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
Slit blades parallelism (HDS)
P468 - Slit blades parallelism (HDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
Slit opening stability (HDS)
P468 - Slit opening stability (HDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
Slit width calibration (VDS)
P468 - Slit width calibration (VDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
Slit opening repeatability (VDS)
P468 - Slit opening repeatability (VDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
Slit blades parallelism (VDS)
P468 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
Slit blades parallelism (VDS)
P468 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil
Slit blades parallelism (VDS)
P468 - Slit blades parallelism (VDS) - Exit slit unit for soft X-ray synchrotron radiation at IPE Beamline at Sirius Synchrotron Light Source, Brazil