P471 – 4″ UHV sputter deposition cluster tool SUPRACON
Application
UHV sputter deposition cluster tool for thin film and multilayer deposition at 4″ substrates
Year of delivery
2020
Installation site
SUPRACON GmbH, Jena, Germany
Design Features
- HV magnetron sputter deposition cluster tool with confocal sputtering configuration.
- In three sputter chambers up to three 3″ magnetrons can be installed.
- Deposition uniformity better than 2% over 90mm diameter at 4″ sample.
- All magnetrons with manual in situ tilting.
- Fully motorized 2 axes sample manipulators with integrated sample clamping stage, pneumatic sample shutter, RF back sputtering option installed and sample temperature stabilization (mild cooling and mild heating).
- Oxydation chamber with dynamic as well as static oxydation pressure regulation.
- Load lock chamber.
- Automatic sample transfer between all chambers via a radial distribution chamber.
Special Features
- At least two different sample sizes (4″ and 6″ wafer) can be handled (using different kind of sample adapters).
- Ar gas backside cooling installed at all sputter chamber sample stages.
Outer Dimensions
Technical specifications and performance values
General
Sputtering chambers SP2, SP3 & SP4
Size
About 490 mm diameter, about 780 mm height
Material
stainless steel
Load lock chamber
Size
About 250 mm diameter, about 400 mm height
Material
stainless steel
Oxydation chamber
Size
About 200 mm diameter, about 300 mm height
Material
stainless steel
Radial distribution chamber
Size
About 1000 mm diameter, about 450 mm height
Material
stainless steel
Vacuum
Sputtering chambers SP2, SP3 & SP4
Base pressure
< 10-8 mbar
Pump down time
1 hour to < 10-7 mbar
Chamber pumping
Cryo pumping stage, chamber lid differentially pumped by dry foreline pump
Load lock chamber
Base pressure
< 10-7 mbar
Pump down time
< 0.5 hours to < 10-6 mbar
Chamber pumping
Turbo pumping stage with dry foreline pump
Oxydation chamber
Base pressure
< 10-7 mbar
Pump down time
2 hours to < 10-7 mbar
Chamber pumping
Turbo pumping stage with dry foreline pump
Radial distribution chamber
Base pressure
< 10-8 mbar
Pump down time
< 5 hours to < 10-7 mbar
Chamber pumping
Turbo pumping stage with dry foreline pump
Manipulator features
Sputtering chambers SP2, SP3 & SP4
Sample size
nominal diameter 4″ substrate
(diameter max. 6″ substrate)
Motion axes
Motorized sample roation axis
Sample clamping tool with motorrized sample release unit (part of the manipulator head) for optimized thermal contact
Pneumatic sample shutter (part of the manipulator head)
Temperatures
0°C up to +100°C at sample
Special features
Sample bias and sputter cleaning (RF, DC or pulsed DC) is possible
Sample preparation features
Oxydation chamber
Dynamic oxydation pressure (regulation)
0.01 mbar up to 1 mbar
upstream as well as downstream pressure regulation implemented
Static oxydation pressure
> 1 mbar up to 15 mbar
Special features
Gas inlet via manual dosing valve in combination with mass flow controller
Pneumatic blocking valves at both gas inlet lines installed
Performance test results
Chamber pump down
Sample tempering & Ar backside cooling
